In-situ FIB PVC to Speed up Fault Isolation of Floating Metal-Insulator-Metal Capacitor Failure

摘要

Metal-Insulator-Metal (MIM) capacitor is one of the most common use passive component nowadays on semiconductor device. Unfortunately, its floating characteristic in semiconductor device make it difficult to further fault isolate to single faulty MIM capacitor within a group of MIM capacitor after remove the metal connection layer. A method to combine passive voltage contrast (PVC) analysis technique, focus ion beam (FIB) and platinum (Pt) coater is used to further localize the exact fail site on the defect MIM capacitor which will be presented in this paper.