Synthesis of 2D materials on epitaxial catalyst films by chemical vapor deposition

摘要

Two-dimensional (2D) materials including graphene and h-BN are promising for future LSIs due to their superb physical and chemical properties. To apply them to electronic materials in the future LSIs, it is necessary to synthesize 2D materials uniformly on a large substrate with high quality. Here, we demonstrate synthesis of these 2D materials using epitaxial catalyst films by chemical vapor deposition.