Improved Microcantilever Geometry for Bio and Chemical Sensing

摘要

Micro cantilever based biochemical sensors have been around for a quite some time. Though they are limited to simple rectangular type of sensing surface, they are quite capable in detecting agents of interest. However one can improve their performance by enhancing their mass sensitivity. In this paper, a numerical study is performed to assess the influence of micro cantilever geometry on its resonance frequency. The change in resonance frequency can be used to detect the added mass. Thus one can use these results to improve the performance of micro cantilever based sensors. ANSYS/Multi physics and COMSOL/Multi physics analysis for frequency is carried out.