Microcapacitive Differential Pressure Sensor diaphragm modeling using MATLAB

摘要

In this Paper, we propose the modeling of diaphragm membrane of Capacitive Differential Pressure Sensor (CDPS) for aircraft altimeter using MATLAB. Simple numerical integration technique is used to understand the complex deflection theory of Plates. Polymide material of Square diaphragm membrane with all edges clamped condition was considered in this analysis. Governing equation of clamped plate theory was explained. Deflection equation was simulated for the pressure range of 100mbar to 1100mbar. Center deflection characteristic was studied and the deflection at each node on the diaphragm membrane surface was measured. The Simulation results obtained using MATLAB shows close agreement with results of standard FEM tool and theoretical values.