Design and analysis of high performance MEMS capacitive pressure sensor for TPMS

摘要

In this paper, an analytical and simulation solution has been developed for Micro electromechanical systems (MEMS) based capacitive pressure sensor which finds application in Tyre pressure monitoring system (TPMS). The device simulations, both static and dynamic have been carried out using Intellisuite software. The result shows that, capacitance varies linearly with applied pressure. Its sensitivity came out to be 0.12 fF/KPa within the pressure range of 0–300 KPa. The static results obtained by simulation are in agreement with the theoretical one. The dynamic analysis gives natural frequency and response time of diaphragm.