首页> 外文会议>2013 20th IEEE International Symposium on the Physical amp; Failure Analysis of Integrated Circuits >Photo-induced instability and temperature dependence of amorphous In-Ga-Zn-O thin film transistors
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Photo-induced instability and temperature dependence of amorphous In-Ga-Zn-O thin film transistors

机译:非晶In-Ga-Zn-O薄膜晶体管的光诱导不稳定性和温度依赖性

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摘要

The photo-induced instability of amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) is investigated. Device characteristics under white light illumination with various intensities and its spontaneous recovery at room temperature after illumination are observed. All the observed phenomena, especially the variation of threshold voltage and subthreshold swing, are explained by a simple model based on the photon generated electrons and oxygen vacancy defects in the a-IGZO channel. Further more, the temperature dependence of transfer characteristics for a-IGZO TFTs can be also explained with the same model.
机译:研究了非晶In-Ga-Zn-O(a-IGZO)薄膜晶体管(TFT)的光诱导不稳定性。观察到在各种强度的白光照明下的器件特性以及在照明后其在室温下的自发恢复。通过一个简单的模型,基于a-IGZO通道中由光子产生的电子和氧空位缺陷,可以解释所有观察到的现象,尤其是阈值电压和亚阈值摆幅的变化。此外,a-IGZO TFT的传输特性的温度依赖性也可以用相同的模型来解释。

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