Electromagnetic analysis of an on-chip spiral inductor in the millimeter-wave band

摘要

The electromagnetic (EM) modeling and EM simulation technique are discussed for an on-chip spiral inductor in the millimeter-wave band. An excitation modeling with a de-embedding technique using thru and line patterns was discussed in this paper. Simulate results with several excitation models were compared with measured one. It was found that the influence of excitation model is not small and it should be appropriately modeled in the EM simulation. The calculated reflection including pads is closer to the measured one.