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Photonic crystal surface emitting lasers based on epitaxial regrowth

机译:基于外延再生的光子晶体表面发射激光器

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Photonic crystal surface emitting lasers (PCSELs) [1], shown schematically in Fig 1(a), offer the ultimate in control in semiconductor lasers, demonstrating power scaling with area as lasing occurs at the band edge [2], high single-mode powers [3], large scale coherent emission [4], control of the beam shape and polarization with design of the photonic crystal geometry [5], and beam steering [3] Previous PCSELs utilised the high refractive index contrast between semiconductor and voids created in the structure by wafer fusion [1–4] or by epitaxial re-growth [6]. However, the presence of voids presents possible issues in device reliability, and reproducibility, and the low refractive index of the PCSEL layer results in difficulties in the design of the lateral waveguide.
机译:图1(a)示意性显示了光子晶体表面发射激光器(PCSEL)[1],它提供了半导体激光器的终极控制能力,展示了随着激光在频带边缘发生激光发射,功率随面积变化[2],高单模功率[3],大规模相干发射[4],通过设计光子晶体几何形状来控制光束形状和偏振[5]以及光束转向[3]以前的PCSEL在半导体和产生的空隙之间利用了高折射率对比通过晶片融合[1-4]或通过外延再生长[6]在结构中形成。然而,空隙的存在在器件可靠性和可再现性方面提出了可能的问题,并且PCSEL层的低折射率导致横向波导的设计困难。

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