Process design and microfabrication of a novel lab on a chip

摘要

“Lab on a chip” devices are a subset of MEMS devices that use microfluidics and mechanical flow control devices, like pumps, valves, sensors and needles. The lab on chip we designed consists of three main parts, a reservoir, a micropump and a microneedle. The reservoir is the part which contains the fluid,(in our study the fluid is water). The micropump is kind of valveless micropump with a nozzle, diffusers and a chamber which operates with a magnetic robber actuator. This actuator acts with a magnetic field. The magnetic robber is fabricated with PDMS (Polydimethylsiloxane) and the PDMS layer thickness is 1mm. The PDMS layer is covered by iron filings with a 0.5mm thickness. In this Lab on chip the microneedle part is a straight horizontal needle with a conical shape which has been cut by mid plan.