Analytical model for ion-implanted 4H silicon carbide metal-semiconductor field-effect transistors

摘要

Ion-implanted SiC MESFETs have some excellent characteristics such as low noise performance, high frequencies, surface planarity, simplicity and lower cost of fabrication, and flexibility and precise control of the doping profiles [1]. In order to help the designer and user, an analytical model for the boxlike profile ion-implanted 4H-SiC MESFETs has been given. Poisson's equation has been solved to obtain the current-voltage characteristics of the SiC MESFETs. The expressions for the channel depth, the pinch off voltage, and the drain current are given. The output current-voltage characteristics of ion-implanted 4H-SiC MESFETs and the effect of temperature on the drain current are investigated with this model.