Determination of Frequency Dependent Fluid Damping of Micro and Nano Resonators for Different Cross-Sections

摘要

This research quantitatively investigates fluid damping of MEMS and NEMS flexural resonators such as scanning probe and carbon nano-tube resonators, aiming to improve the quality factor prediction and therefore the resonator design. Fluid damping in beam-type resonators is most affected by resonant frequency, device dimensions and cross-sectional shape which are systematically examined within. An experimentally motivated linear fluid damping model is rendered with numerical methods and a general fluid damping law is achieved with limited error. By generalizing to include rectangular, circular and trapezoidal cross-sections, this analysis encompasses a cadre of micro- and nano- scale beam resonators including cantilevers, carbon nanotubes and scanning probe, respectively.