Microelectromechanical Resonator using Carbon Nanotube and Fabrication Method for the same and Frequency Generator using the Resonator

摘要

PURPOSE: A MEMS resonator using a carbon nano tube, a method for fabricating the same, and a frequency generator using the same are provided to generate vibration at a desired frequency by forming the MEMS resonator with the carbon nano tube. CONSTITUTION: A carbon nano tube(30) is installed between the first conductive support portions(20) in order to utilize the carbon nano tube(30) as a resonator. The carbon nano tube(30) is synthesized by using a CVD(Chemical Vapor Deposition) method or an arc discharge method or a laser method before the carbon nano tube(30) is installed between the first conductive support portions(20). The carbon nano tube(30) is loaded on a desired position of a substrate(10). The carbon nano tube(30) is adhered on the desired position of the substrate(10) by pressing the first conductive support portions(20). The second conductive support portion(40) is formed by depositing a metal material on the carbon nano tube(30).