BUCKLING INDUCED NONLINEAR PHENOMENON IN A MICRO-ELECTROMECHANICAL RESONATOR

摘要

Oscillations of micro-electromechanical resonators constructed from clamped-clamped beam structures are studied in this effort. Piezoelectric actuation is used to excite these structures on the input side and piezoelectric sensing is carried out on the output side. Although axial loads in clamped-clamped beam based on micro-electromechanical systems (MEMS) have been considered before, the relevance of buckling to this problem has not studied before in such "small" scale systems. In this work, possibilities for buckling are examined, and it is shown that for resonance excitations, consideration of buckling may help explain associated experimentally observed spatial patterns as a nonlinear phenomenon.