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Reduction of Average Cycle Time at a Wafer Fabrication Facility

机译:减少晶圆制造厂的平均周期时间

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摘要

This paper is concerned with the development of effective solutions for the reduction of average cycle time at a wafer fabrication facility. The wafer fabrication environment is quite different from the usual flow shop or job shop environments, with a distinguishing feature being the reentrant flow of the lots through the system. Lots at different stages of their manufacturing cycle may revisit the machines. This gives rise to the need of effective policies to sequence lots through the system. Two methodologies have been developed to effect a reduction in the cycle time. The first methodology is a heuristic procedure based on the idea of reducing idle time on the bottleneck machine. The second methodology is based on mathematical programming. The proposed methodologies are implemented using the data obtained from the M/A-COM's wafer fabrication facility in Roanoke, Virginia. The facility consists of ninety-two machines and its products can be classified into six different types. The performance of one of the proposed methodologies is compared with that of the policies currently followed at the M/A-COM facility in Roanoke, Virginia and the results are presented.
机译:本文关注于减少晶圆制造设备平均周期时间的有效解决方案的开发。晶圆制造环境与通常的流水车间或作业车间环境完全不同,其显着特征是批次的折返流通过系统。在其制造周期的不同阶段的许多批次可能会重新使用机器。这导致需要有效的策略来对系统中的批次进行排序。已经开发出两种方法来减少周期时间。第一种方法是基于减少瓶颈机器上的空闲时间的思想的启发式过程。第二种方法是基于数学编程的。使用从M / A-COM位于弗吉尼亚州罗阿诺克的晶圆制造厂获得的数据来实施所提出的方法。该设施由九十二台机器组成,其产品可分为六种不同类型。将一种提议的方法的性能与弗吉尼亚州罗阿诺克的M / A-COM设施当前遵循的策略的性能进行比较,并给出了结果。

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