PROTECTION OF MOLYBDENUM AND MOLYBDENUM -ALLOY THIN FILMS AGAINST LOW - TEMPERATURE OXIDADTION

摘要

Molybdenum is an interesting functional material for thin film applications like electrical connections in thin film transistor flat panel displays (TFT-FPD) or thin film solar cells (CIS). Despite its advantageous properties, the use of pure Molybdenum has been restricted mainly because of its low stability against corrosion in moist air even at room temperature. In this paper we will show how thin films (< 0,5μm) of Mo can be protected against low -temperature oxidation either by alloying with greater to or equal 10 wt% Rhenium or by coating with a thin layer of MoO_2.