METHOD FOR MANUFACTURING MOLYBDENUM OXIDE-CONTAINING THIN FILM STARTING MATERIAL FOR FORMING MOLYBDENUM OXIDE-CONTAINING THIN FILM AND MOLYBDENUM AMIDE COMPOUND

摘要

The present invention relates to a process for producing a thin film, which comprises introducing a vapor containing a molybdenum compound obtained by vaporizing a thin film forming raw material containing a compound represented by the following general formula (I) into a gas phase and introducing an oxidizing gas to decompose and / And reacting the molybdenum oxide to form a thin film on the substrate. Wherein, R ^1, R ² denotes a straight-chain or branched alkyl group having a carbon number of 1 ~ 4, R ³ represents a t- butyl or t- amyl, y represents 0 or 2, x is y is zero And when y is 2, R ¹ and R ^{2 which} are present may be the same or different.