Large area nano manufacturing technologies for industries

摘要

The most important question is how to fabricate the nano-structures and replicate the structures on the large substrates or films with low cost? The new micro-nano manufacturing systems have been introduced either for the research work, or for the industrial applications, including UV laser interference lithographic systems for the nano-patterning, such as the photonic crystals with the period of 400nm一SOOnm on the large size substrates，up to40", the roll-to roll nano imprinting systems.