ISO 3530:1979 Vacuum technology — Mass-spectrometer-type leak-detector calibration

真空技术——质谱仪型检漏仪校准

基本信息

标准号

ISO 3530:1979

标准状态

现行

发布单位或类别

国际组织-国际标准化组织(IX-ISO);

发布日期

实施日期

废止日期

CCS分类

ICS分类

23.160 流体系统和通用件 - 真空技术

研制信息

起草单位

- 展开▼

起草人

归口单位

ISO/TC 135/SC 6

摘要

Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio. 仅描述了具有整体高真空系统的泄漏检测器，以将质谱仪的传感元件保持在低压下。概述了两个程序，一个用于确定最小可检测泄漏率，另一个用于确定最小可检测浓度比。展开▼

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