首页> 外国专利> ELASTIC WAVE DEVICE, FILTER DEVICE, AND METHOD FOR MANUFACTURING ELASTIC WAVE DEVICE

ELASTIC WAVE DEVICE, FILTER DEVICE, AND METHOD FOR MANUFACTURING ELASTIC WAVE DEVICE

机译:一种弹性波装置、滤波装置及一种制造弹性波装置的方法

摘要

Provided is an elastic wave device which is unsusceptible to leaking elastic waves in a direction that is perpendicular to a lamination direction of a piezoelectric substrate. This elastic wave device 1 comprises: a piezoelectric substrate 2 having a piezoelectric layer 5 and provided with a hollow portion 10; and first and second electrodes 6, 7. In a plan view, the piezoelectric layer 5 has a first region A overlapping with the first and second electrodes 6, 7 and the hollow portion 10, a second region B not overlapping with the hollow portion 10 and surrounding the first region A, and a third region C overlapping with the hollow portion 10 and positioned between the first and second regions A, B. The cross-sectional shape of the piezoelectric substrate 2 along the lamination direction has a curved shaped at a portion including a boundary D of the first and third regions A, C. When the maximum value of the thickness of the piezoelectric layer 5 in the first region A is defined as t1M, and the thickness in the second region B is defined as t2, the relationship between t2 and t1M at a portion positioned in the second region B at least at a boundary with the third region C is t1M>t2.
机译:提供一种弹性波装置,该装置在垂直于压电基板的层压方向的方向上不易受到泄漏弹性波的影响。该弹性波器件1包括:具有压电层5的压电基板2,并设置有中空部分10;以及第一和第二电极6、7。在平面图中,压电层5具有与第一和第二电极6、7和中空部分10重叠的第一区域A,与中空部分10不重叠并围绕第一区域A的第二区域B,以及与中空部分10重叠并位于第一和第二区域A之间的第三区域C, B.压电基板2沿层压方向的横截面形状在包括第一和第三区域A、C的边界D的部分处具有弯曲的形状。当第一区域A中压电层5的厚度最大值定义为t1M,第二区域B的厚度定义为t2时,t2与t1M在位于第二区域B的部分处至少与第三区域C的边界处的关系为t1M>t2。

著录项

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号