Optical power splitters with a multiple-level arrangement

摘要

Structures for an optical power splitter and methods of forming a structure for an optical power splitter. A first waveguide core includes a portion positioned over a multimode interference region, a second waveguide core includes a portion positioned over the multimode interference region, and a third waveguide core includes a portion positioned over the multimode interference region. The first waveguide core provides an input port to the optical power splitter. The second waveguide core provides a first output port from the optical power splitter, and the third waveguide core provides a second output port from the optical power splitter.