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method of manufacturing photodetector by applying tensile strain photodetector manufactured by the method and apparatus for manufacturing the photodetector
method of manufacturing photodetector by applying tensile strain photodetector manufactured by the method and apparatus for manufacturing the photodetector
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机译:制造光电探测器的应用方法拉伸应变光电探测器的制造对制造业的方法和装置光电探测器
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摘要
Disclosed are a method for manufacturing a photodetector using tensile strain, a photodetector manufactured thereby, and an apparatus for manufacturing the same. A method for manufacturing a photodetector according to an embodiment of the present invention includes: preparing a stretchable thin film having a nanomembrane array pattern made of an active material for photodetection; and applying a tensile strain to the stretchable thin film to manufacture an optical detection array sensor.
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