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BIOSENSOR, METHOD FOR MANUFACTURING FIELD EFFECT TRANSISTOR FOR BIOSENSOR, AND FIELD EFFECT TRANSISTOR FOR BIOSENSOR

机译:生物传感器,用于生物传感器的场效应晶体管的制造方法,以及用于生物传感器的场效应晶体管

摘要

Provided are: a biosensor which has a simpler configuration and can be manufactured through a simpler manufacturing process than conventional biosensors; a method for manufacturing a field effect transistor for a biosensor; and a field effect transistor for a biosensor. A biosensor 10 for detecting an electric signal that varies with the ion concentration of a solution 20 comprises: a FET 12 composed of an ITO film 16 and provided on a glass substrate 14; and a storage part 22 for storing the solution 20 containing a sample. The ITO film 16 has a source electrode 12A, a drain electrode 12B, and a channel part 12C that is disposed between the source electrode 12A and the drain electrode 12B and is in contact with the solution 20. The film thickness of the channel part 12C is formed thinner than those of the source electrode 12A and the drain electrode 12B.
机译:本发明提供了一种生物传感器,其具有比传统生物传感器更简单的配置并且可以通过更简单的制造工艺来制造;一种用于制造生物传感器的场效应晶体管的方法;以及用于生物传感器的场效应晶体管。一种用于检测随溶液20的离子浓度变化的电信号的生物传感器10包括:由ITO膜16组成的FET 12,其设置在玻璃基板14上;以及存储部22,用于存储含有样品的溶液20。ITO膜16具有源电极12A、漏电极12B和通道部分12C,该通道部分12C布置在源电极12A和漏电极12B之间并且与溶液20接触。沟道部分12C的膜厚度形成为比源电极12A和漏电极12B的膜厚度薄。

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