WAFER BOAT STRUCTURE, AND WAFER BOAT ASSEMBLY AND DIFFUSION FURNACE HAVING SAME

摘要

Disclosed are a wafer boat structure, and a wafer boat assembly and diffusion furnace having same. The wafer boat structure comprises: a support frame, wherein the support frame comprises an upper support member and a lower support member, a plurality of support rods are arranged between the upper support member and the lower support member, two ends of each support rod are respectively connected to the upper support member and the lower support member, the plurality of support rods are arranged at intervals in the circumferential direction of the upper support member, and an opening suitable for wafers to pass therethrough is formed between two adjacent support rods of the plurality of support rods; and wafer support parts, wherein the wafer support parts are arranged on the support rods to bear wafers. Each wafer support part comprises a support plate and at least one wafer insertion plate, wherein the support plate and the at least one wafer insertion plate bear the same wafer; the support plate is connected to the support rods and corresponds to the central positions on the upper support member and the lower support member; and the wafer insertion plate is arranged on inner sides of the support rods to support the edge of the wafer.