Image correction method in electron beam observation device, electron beam observation system, electron beam observation device, and correction coefficient calculation method for image correction

摘要

Image correction accurately reduces the difference in the electron beam observation device. In an electron beam observation device that generates an image by scanning an electron beam on a sample, a correction coefficient calculation method for correcting an image between a plurality of electron beam observation devices, wherein the first electron beam observation device is used. , A sample having a second pattern having a shape or size different from that of the first pattern and the first pattern, or a first sample having the first pattern and a second sample having the second pattern. The step of scanning the first electron beam into the first and second patterns to generate the first image, and the second electron beam observing device make the second electron beam into the first and second patterns. The step of scanning to generate a second image and the first or second electron beam observation device selectively extracts from the first and second frequency characteristics calculated based on the first and second images. It is characterized by including a step of calculating a correction coefficient at the peak frequency.