Two-dimensional nanoindentation device and method

摘要

It is a two-dimensional nanoindentation measuring device, and has a first actuator that applies a first force along a first direction and a second actuator that applies a second force along a second direction orthogonal to the first direction. The first end of the first long member is attached to the first actuator, and the indenter tip that abuts on the sample surface is attached to the second end. The first end of the second long member is attached to the second actuator, and the second end is connected to the second end of the first long member. The first elongated member is rigid along the first direction and compliant along the second direction, and the second elongated member is rigid along the second direction and compliant along the first direction. The first force is applied to the indenter tip along the first direction through the first elongated member, and the second force is applied to the indenter tip along the second direction through the second elongated member.