Self-awareness and correction heterogeneous platforms incorporating integrated semiconductor processing modules and how to use them

摘要

The present disclosure relates to mass manufacturing systems for processing and measuring workpieces in a semiconductor processing sequence without leaving the controlled environment of the system (eg, quasi-atmospheric pressure). The process chambers of the system are connected to each other via transfer chambers used to move workpieces between process chambers in a controlled environment. The transfer chamber includes a measuring module capable of measuring the attributes of the workpiece before and / or after the process process. The measurement module may include an inspection system mounted above, below, or inside the transfer chamber.