Teaching device, board transfer device, board processing device, teaching method, and manufacturing method of electronic devices

摘要

PROBLEM TO BE SOLVED: To provide a teaching method capable of completing a teaching work with high accuracy and at an early stage, simple and ensuring a cleanliness in an apparatus. SOLUTION: In a transfer operation of a substrate to a substrate mounting portion provided in a substrate mounting chamber by a robot that supports and conveys the substrate, the robot controls a path to be followed by the support portion that supports the board of the robot. It is a teaching device for teaching to the control unit, and indicates the positions of the teaching jig to be supported by the support portion, the first positioning means for positioning the teaching jig with respect to the support portion, and the teaching jig. It has a feature portion for the purpose and a position detecting means for detecting the position of the feature portion with respect to the board mounting portion, and positions the detection jig and the detection jig provided on the board mounting portion with respect to the board mounting portion. A second positioning means for acquiring a path to be stored in the control unit based on the position of the feature unit acquired from the position detecting means is provided. [Selection diagram] FIG. 9A