Flexible tactile sensor array for three­axis force measurement

摘要

The present invention relates to a flexible dome-shaped tactile sensor capable of measuring a triaxial force, a tactile sensor array, and a manufacturing method thereof, and more particularly, in the tactile sensor, an array type printed on a flexible lower substrate so that each is electrically connected a plurality of lower electrodes of a sensing layer coupled to an upper portion of each of the lower electrodes to measure a triaxial force; a plurality of upper electrodes in the form of an array, each of which is coupled to the upper portion of the sensing layer and printed on the lower portion of the flexible upper substrate; hemispherical bumps coupled to the sensing layer to surround the plurality of upper electrodes; and a triboelectric charge sensing electrode coupled to the upper electrode to measure triboelectric electricity generated by a measurement target in contact with the hemispherical bump. will be.