ACOUSTIC INTENSITY SENSOR USING A MEMS TRIAXIAL ACCELEROMETER AND MEMS MICROPHONES

摘要

An airborne acoustic vector sensor for simultaneously measuring triaxial particle acceleration in three dimensions and pressure includes a triaxial MEMS accelerometer sensitive to an Earth gravitational field. The airborne acoustic vector sensor includes one or multiple MEMS microphones sensitive to sound pressure and overlapping the accelerometer in frequency. The airborne acoustic vector sensor includes a solid body having a density approximating a density of air. The accelerometer is mounted in or upon the solid body. The airborne acoustic vector sensor includes a suspension system supporting the accelerometer and solid body within a framework.