Design and Fabrication of a MEMs Graphene-PDMS based Flexible Strain Sensor

摘要

石墨烯是一种二维蜂窝状结构sp2杂化碳原子,可能性在许多应用程序中由于其优异的机械和电气性能。石墨烯的一个应用是在传感器领域。石墨烯在承受机械应变时，其电子性质不会退化，这对应变传感器有利。本文研究了石墨烯的某些特性，如压电电阻率和柔韧性，以展示如何利用它们制作应变传感装置。本文还讨论了成图石墨烯的制备过程及其在柔性衬底上的转移过程。　　开发一种可靠的石墨烯图形化过程是制造可拉伸石墨烯传感器的第一步。石墨烯通过光刻和蚀刻工艺制成图案，然后通过软光刻和氯化铁溶液对镍箔的湿法蚀刻相结合的方法转移到柔性聚合物基片上。石墨烯图形化是制造可靠、灵敏传感器的关键步骤。在这个过程中，石墨烯可以被一致地塑造成不同的形状和大小。利用石墨烯作为传感材料也是如此最后的装置是一个柔性石墨烯应变传感器，能够成功且可靠地测量出不同量级的应变，具有良好的线性度、良好的一致性和可重复性。该传感器的电阻值也较低，符合工业标准~1.5kohms。

目录

声明

Table of Major Symbols and Units

Chapter One: Introduction

1 Introduction

1.0.1 Motivation

1.0.2 Outline of Thesis

1.1 Introduction to Graphene

1.1.1 Properties

1.1.2 Applications

1.2 Microelectromechanical Systems (MEMS) Strain Sensor

1.2.1 Graphene Based Strain Sensor

Chapter Two: Literature Review

2 Fabrication of A Graphene Based Strain Sensor

2.1 Graphene Synthesis

2.2 Single Layer versus Multi-Layer Graphene

2.3 Patterning Decisions

2.4 Transfer Decisions

2.5 Final Device Design Decisions

Chapter Three: Experiment Setup and Fabrication

3.0 Experimental Setup

3.1 Graphene Patterning

3.1.1 Review of Conventional Patterning Processes

3.1.2 Graphene Patterning Steps

3.2 Graphene Transfer

3.2.1 Introduction to Transfer Methods

3.2.2 Step 1: PDMS Graphene Transfer

3.2.3 Step 2: Etching Initial Nickel Substrate

3.2.3 Raman Spectroscopy Tests

3.4 Flexible Graphene Sensors

3.4.1 Single Graphene Sensor

Chapter Four: Device Performance and Results

4.1 Piezoresistive Effect

Chapter Five: Conclusion and Future Work

5.1 Conclusion

5.2 Future Work

参考文献