KNOWLEDGE RECOMMENDATION FOR DEFECT REVIEW

摘要

A server for recommending information for defect review is disclosed. The server includes a processor electronically coupled to an electronic storage device that stores a plurality of information files related to wafer defects. the processor is configured to execute a series of instructions so that the server receives a request for information recommendation for inspecting the inspection image from the defect classification server; retrieving an information file matching the inspection image from the electronic storage device; and transmit the search result to the defect classification server.