Thinner composition for improving applying performance a photosensitive resin and anti-reflective coating, and removing the photosensitive resin and anti-reflective coating

摘要

The present invention provides a photosensitive resin comprising (a) C2 to C4 alkylene glycol, C1 to C4 alkyl ether acetate, (b) C1 to C10 alkyl lactate, and (c) cyclopentanone, and a thinner composition for removing antireflection film do.