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Fluxless gang die bonding arrangement

机译:Fluxless Bang模切布置

摘要

The present invention comprises an arrangement and process for the fluxless manufacture of an integrated circuit component, comprising the steps of loading a solder ball and chip arrangement, solder ball side up or down, onto a first or a second donor chuck respectively; monitoring the solder ball and chip arrangement by a computer-controlled camera; removing the solder ball and chip arrangement from the donor chuck by a computer-controlled gripper mechanism; moving the solder ball and chip arrangement via the gripper mechanism onto a computer-controlled gang carrier, the monitored by a second computer controlled camera; flipping the gang carrier about a horizontal axis so as to arrange the solder ball and chip arrangement into an inverted, solder ball side down orientation over a receiver chuck substrate, monitored and positionally controlled by a third computer-controlled camera; and compressing the solder ball side down solder ball and chip arrangement onto the receiver chuck substrate by a computer-controlled compression rod so as to bond the solder ball side down solder ball and chip arrangement onto the receiver chuck substrate so as to form an integrated circuit assembly.
机译:本发明包括用于集成电路部件的浮动制造的装置和工艺,包括分别将焊球和芯片布置,向上或向下装载焊球和芯片布置的步骤分别在第一或第二供体卡盘上;通过计算机控制的相机监控焊球和芯片布置;通过计算机控制的夹持机构从供体卡盘中取出焊球和芯片布置;将焊球和芯片布置通过夹具机构移动到计算机控制的团伙载体上,由第二计算机控制相机监控;将GANG载体绕横轴翻转,以将焊球和芯片布置将倒置的焊球侧向下倾斜在接收器卡盘基板上,由第三计算机控制的相机监控和位置控制;通过计算机控制的压缩杆将焊球侧向下焊球和芯片布置压缩到接收器卡盘基板上,以便将焊​​球侧向下焊球和芯片布置粘合到接收器卡盘基板上,以形成集成电路集会。

著录项

  • 公开/公告号US2022005720A1

    专利类型

  • 公开/公告日2022-01-06

    原文格式PDF

  • 申请/专利权人 JIAN ZHANG;

    申请/专利号US202016873779

  • 发明设计人 JIAN ZHANG;

    申请日2020-07-02

  • 分类号H01L21/68;H01L21/67;H01L21/687;H01L21/683;H01L23;

  • 国家 US

  • 入库时间 2024-06-14 22:39:32

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