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Extreme ultraviolet light generation apparatus and extreme ultraviolet light generation apparatus controlling method

机译:极端紫外光发电装置和极端紫外光发光装置控制方法

摘要

An EUV light generation apparatus includes: a chamber; an EUV light condensing mirror positioned inside the chamber and having a reflective surface that determines a first focal point and a second focal point, the reflective surface and the second focal point being positioned on respective sides of a first surface; at least one magnet configured to generate a magnetic field at and around the first focal point; a first gas supply unit configured to supply first gas to the reflective surface in the chamber and opened near an outer peripheral part of the reflective surface; a second gas supply unit configured to supply second gas into the chamber and opened at a position between the first surface and the second focal point; and a discharge device configured to discharge gas inside the chamber and opened at a position between the first focal point and the at least one magnet.
机译:EUV光发电装置包括:腔室; 位于腔室内的EUV光冷凝镜并具有确定第一焦点和第二焦点的反射表面,反射表面和第二焦点位于第一表面的相应侧; 至少一个磁体,其配置成在第一焦点和周围产生磁场; 第一气体供应单元被配置为将第一气体供应到腔室中的反射表面并打开反射表面的外周部分附近; 第二气体供应单元被配置为将第二气体供应到腔室中并在第一表面和第二焦点之间的位置处打开; 和放电装置,被配置为在腔室内排出气体并在第一焦点和至少一个磁体之间的位置处打开。

著录项

  • 公开/公告号US11211239B2

    专利类型

  • 公开/公告日2021-12-28

    原文格式PDF

  • 申请/专利权人 GIGAPHOTON INC.;

    申请/专利号US202016786542

  • 发明设计人 ATSUSHI UEDA;TAKASHI SAITO;

    申请日2020-02-10

  • 分类号H01J61/28;H01J61/02;H01J61/12;

  • 国家 US

  • 入库时间 2022-08-24 23:04:08

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