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Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system
Extreme ultraviolet light generation apparatus and control method for laser apparatus in extreme ultraviolet light generation system
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机译:极端紫外线产生系统中的极端紫外线产生装置和激光装置的控制方法
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摘要
An extreme ultraviolet light generation apparatus may include a chamber containing a plasma generation region irradiated by a pulse laser beam from a laser apparatus, a target supply device configured to supply a plurality of targets consecutively to the plasma generation region in the chamber, a target detection unit configured to detect a target outputted from the target supply device, and a laser controller configured to control the laser apparatus; the laser controller generating a light emission trigger instructing a laser device included in the laser apparatus to emit a pulse laser beam, and outputting the generated light emission trigger to the laser apparatus, in accordance with a detection signal from the target detection unit; and the laser controller adjusting generation of the light emission trigger outputted consecutively to the laser apparatus so that a time interval of the light emission trigger is within a predetermined range.
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