Fluorescent X-ray analyzer and control method of fluorescent X-ray analyzer

摘要

PROBLEM TO BE SOLVED: To provide a fluorescent X-ray analyzer capable of preventing deterioration or breakage of a sample and contamination inside the apparatus even when an abnormality occurs in the fluorescent X-ray analyzer, and a control method of the fluorescent X-ray analyzer. do. SOLUTION: A moving mechanism for moving a sample between a standby position and a measurement position, an X-ray source for irradiating the sample with primary X-rays, a detector for measuring the intensity of incident fluorescent X-rays, and a detector. A measuring unit having a moving mechanism and a first control unit that controls the operation of the X-ray source, and an analysis unit that analyzes the sample based on the intensity of the fluorescent X-ray measured by the detector. It has an information processing unit having a second control unit that communicates with the first control unit and controls the measurement unit, and the first control unit has the first control unit and the second control unit. It has an evacuation means for performing an evacuation control for evacuation of the sample at the measurement position to the standby position when the communication with the unit is interrupted. [Selection diagram] Fig. 1