A computer-controlled system for plasma ion energy auto-analyzer was technicallystudied for rapid and online measurement of plasma ion energy distribution. The system intel-ligently controls all the equipments via a RS-232 port, a printer port and a home-built circuit.The software designed by LabVIEW G language automatically fulfils all of the tasks such as sys-tem initializing, adjustment of scanning-voltage, measurement of weak-current, data processing,graphic export, etc. By using the system, a few minutes are taken to acquire the whole ion energydistribution, which rapidly provides important parameters of plasma process techniques based onsemiconductor devices and microelectronics.
展开▼
