Atomic diffusion bonding method and bonding structure

摘要

PROBLEM TO BE SOLVED: To perform atomic diffusion bonding by a bonding film made of a nitride formed on a bonding surface. SOLUTION: In a vacuum vessel, a bonding film made of a nitride is formed on the smooth surface of each of two substrates having smooth surfaces, and the bonding films formed on the two substrates are in contact with each other. By superimposing the two substrates, the two substrates are bonded by causing atomic diffusion at the bonding interface of the bonding film. [Selection diagram] Fig. 2