EUV radiation source, insert for EUV radiation source, and insert for insert for EUV radiation source

摘要

Improvement of EUV source.The inner insert (11) for the passage opening (10) in the outer insert (8) for the EUV radiation source (1) is embodied in a plurality of parts and / or extends in the longitudinal direction (9) and has different internal diameters It has a plurality of sections (26, 27) having (DI, DA).Diagram