METHOD FOR CLEANING A SPUTTERING TARGET METHOD FOR MANUFACTURING A SPUTTERING TARGET METHOD FOR MANUFACTURING A RECYCLED INGOT AND A RECYCLED INGOT

摘要

A step of separating a target material from a target material of a sputtering target formed by bonding a target material mainly composed of metal and a support member with a bonding material, and a step of treating a bonding surface of the target material with the support member with a base. A method of cleaning the target material, including.