Urgent exhaust system of semiconductor manufacturing equipment

摘要

An emergency exhaust system of a semiconductor manufacturing facility connected to a clean dry air (CDA) supply line is provided. The emergency exhaust system of a semiconductor manufacturing facility is configured to pass one or more supply pipes for supplying chemicals supplied from one or more chemical tanks to the semiconductor processing device, and a plurality of leaks for detecting chemical leakage from the one or more supply pipes. A chemical supply device including a sensor, an exhaust activation part installed in the exhaust pipe through which the air inside the chemical supply device is discharged to activate exhaust when compressed air is injected, and installed between the exhaust activation part and the CDA supply line a pneumatic control unit that is installed in the inlet pipe through which the compressed air from the CDA supply line flows, and controls the pneumatic pressure of the inlet pipe by controlling the inflow of the compressed air supplied from the CDA supply line; and at least one of a plurality of leak sensors and a processor for controlling the pneumatic control unit connected to the CDA supply line to urgently discharge harmful air inside the chemical supply device through the exhaust activation unit to the exhaust pipe when a chemical leak is detected from the sensor.