CRYSTAL ORIENTATION ANALYZER, CRYSTAL ORIENTATION ANALYSIS METHOD AND LEARNED MODEL GENERATION METHOD

摘要

PROBLEM TO BE SOLVED: To analyze more easily the crystal orientation of polycrystalline materials.;SOLUTION: A crystal orientation analyzer 10 includes: an illumination device 24 that is configured to irradiate a surface of sample 18 with an illumination luminous flux 36 having a specific incident angle θ and azimuth angle φ, and to make the azimuth angle φ of the illumination luminous flux 36 variable; imaging device 22 that images the surface of the sample 18 under a plurality of illumination conditions in which the azimuth angles φ of the illumination luminous flux 36 are different, and generates a plurality of luminance images in which the surface of the sample 18 is imaged under each of the plurality of illumination conditions; and a computing device that estimates the distribution and crystal orientation of crystal grains on the surface of sample 18 using the plurality of luminance images 14.;SELECTED DRAWING: Figure 3;COPYRIGHT: (C)2021,JPO&INPIT