PROBLEM TO BE SOLVED: To provide a polarization microscope type crystal orientation analysis apparatus in which analysis is easily performed even in a state that a temperature load is applied on a sample, and to provide a polarization microscope type crystal orientation analysis method.;SOLUTION: The crystal orientation analysis apparatus includes: an objective lens 31 which is disposed opposite to the sample 2 mounted on a sample stage 1; a detector 41 and a confocal lens 42 of an LED light source which radiates a light beam on the sample 2 via the objective lens 31; a half mirror 32 which bends the optical path of the light beam; the detector 41 of the LED light source, which receives a portion of the light beam which is reflected on the half mirror 32 after reflected on the sample 2 and returned via the objective lens 31; an image processor 43 which adjusts the position of the confocal lens 42 on the basis of the output of the detector; a polarizer 30 which is inserted between the half mirror 32 and the confocal lens 42 during analysis; and an analyzer 34 or the like, which is disposed on the optical path of the portion of the light beam which is returned via the objective lens 31 and passed through the half mirror 32; and an imaging lens 35 or the like, which turns the light beam into an image.;COPYRIGHT: (C)2010,JPO&INPIT
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