Analyzer of the analysis methods and grain orientation of the crystal grain orientation

摘要

PROBLEM TO BE SOLVED: To analyze a crystalline domain automatically.SOLUTION: In an analytical method for a crystal grain orientation, for each of plural areas of an electron microscope image, Fourier transformation is performed to generate a Fourier image (S16), intensity of the Fourier image with respect to an angle is calculated (S18), and a crystalline domain in the electron microscope image is analyzed based on the intensity (S26).