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Double sided cooling type semiconductor module, double-sided cooling type semiconductor device, and double-sided cooling type semiconductor module
Double sided cooling type semiconductor module, double-sided cooling type semiconductor device, and double-sided cooling type semiconductor module
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机译:双面冷却型半导体模块,双面冷却型半导体器件,双面冷却型半导体模块
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摘要
Problem to be solved: to provide a method of manufacturing a double-sided cooling type semiconductor module, a double-sided cooling type semiconductor device, and a double-sided cooling type semiconductor module superior in reliability.Double sided cooling type semiconductor module 100Semiconductor device 1 andA first substrate 11a provided on one main surface side of a semiconductor deviceA second substrate 11b provided on the other main surface side of a semiconductor deviceA first joint 2 comprising a copper sintered body 31 for bonding a semiconductor element to a first substrateA second joint 4 comprising a copper sintered body 31 and a spacer 41 for joining the semiconductor device to the second substrate.Diagram
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