PRETREATMENT DEVICE FOR REGENERATION OF SPECIAL GAS USED IN SEMICONDUCTOR MANUFACTURING PROCESS AND PRETREATMENT METHOD THEREOF

摘要

The pretreatment device for regenerating a special gas used in a semiconductor manufacturing process according to an embodiment of the present invention receives a gas that has undergone a pre-purification treatment with respect to the exhaust gas in which the special gas is diluted from the semiconductor manufacturing process, and CH4 and CF4 a catalyst processing chamber for decomposing at least one of; a heating chamber provided at the front end of the catalyst treatment chamber to increase the temperature of the gas introduced into the catalyst treatment chamber; It is provided at the front end of the heating chamber and heat exchanges between the pre-purified gas and the return gas discharged from the catalyst treatment chamber to increase the temperature of the pre-purified gas and deliver it to the heating chamber, and the return gas is 1 car cooling heat exchanger; a cooling chamber for secondarily cooling the return gas cooled primarily by the heat exchanger; an adsorption unit for removing at least one of HF, F2, CO, CO2 and H2O from the secondary cooled gas discharged from the cooling chamber; and a fan that maintains the operating pressure and delivers the exhaust gas from the adsorption unit to the gas regeneration system.