MANUFACTURING APPARATUS AND METHOD FOR PARYLENE LAYER WITH REAL-TIME MONITORING FOR THICKNESS OF PARYLENE LAYER

摘要

The present invention relates to an apparatus and method for producing a parylene layer capable of real-time thickness monitoring. More specifically, it relates to an apparatus and method for producing a parylene layer capable of real-time thickness monitoring for calculating the thickness of a deposited parylene layer using an impedance value of the parylene layer. The apparatus for producing a parylene layer capable of real-time thickness monitoring according to the present invention includes a deposition chamber, a sensor unit disposed in the deposition chamber, and parylene deposited on the sensor unit in the deposition chamber through the sensor unit. Parylene) layer is deposited based on the impedance analysis unit measuring the impedance of the layer and the information on the impedance of the parylene layer measured by the impedance analysis unit and the information about the reference thickness and the reference impedance of the parylene layer stored in advance It may include a calculation unit for calculating the thickness of the parylene layer.