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COATING APPARATUS FOR PARYLENE AND PRODUCTION METHOD OF SEQUENTIALLY LAYERED PARYLENE FILMS OR PARYLENE FILM WITH CONTROLLED COMPOSITION OF MIXED PARYLENE MONOMERS USING SAID COATING APPARATUS
COATING APPARATUS FOR PARYLENE AND PRODUCTION METHOD OF SEQUENTIALLY LAYERED PARYLENE FILMS OR PARYLENE FILM WITH CONTROLLED COMPOSITION OF MIXED PARYLENE MONOMERS USING SAID COATING APPARATUS
PURPOSE: Parylene monomer, a parylene coating apparatus, and a method for manufacturing the hetero parylene thin film are provided to easily deposit a multi-layered thin film by successively depositing hetero parylene monomers. CONSTITUTION: Two or more separated parylene monomer evaporating parts(20, 20') are prepared. Monomer evaporating valves(21, 21') separately adjust the flow rate of evaporated parylene monomer. A mixing part(30) obtains the evaporated parylene monomer and supplies mixed parylene monomer to a thermal decomposing part(40). The thermal decomposing part thermally decomposes the parylene monomer.
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