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Mask frame integration, a carrier for the mask frame, and how to handle the mask
Mask frame integration, a carrier for the mask frame, and how to handle the mask
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机译:面具框架集成,掩模框架的载体,以及如何处理掩码
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摘要
A carrier for the mask is described. wherein the carrier has a carrier body having a surface configured to face at least a portion of the mask, the carrier body having an opening for material deposition; and a magnetic holding arrangement having one or more magnetic holders arranged around an opening in the carrier body in the carrier body.
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