机译:掩膜壁角度对掩膜电化学加工过程中基孔形状变化的影响
College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics,Nanjing 210016, China;
College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics,Nanjing 210016, China;
College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics,Nanjing 210016, China;
College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics,Nanjing 210016, China;